Field effect of fixed negative charges on oxidized silicon induced by AlF3 layers with fluorine deficiency: Fid-Bau Portal

Field effect of fixed negative charges on oxidized silicon induced by AlF3 layers with fluorine deficiency

Konig, D. / Zahn, D. R. / Ebest, G.

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Field effect of fixed negative charges on oxidized silicon induced by AlF3 layers with fluorine deficiency

Konig, D. / Zahn, D. R. / Ebest, G.

Field effect of fixed negative charges on oxidized silicon induced by AlF3 layers with fluorine deficiency

Konig, D. / Zahn, D. R. / Ebest, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Field effect of fixed negative charges on oxidized silicon induced by AlF3 layers with fluorine deficiency

Contributors:

Konig, D. (author) / Zahn, D. R. (author) / Ebest, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 234 ; 222-227

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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