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Constitution, microstructure, mechanical properties, and performance of magnetron-sputtered carbon films with additions of silicon
Constitution, microstructure, mechanical properties, and performance of magnetron-sputtered carbon films with additions of silicon
Constitution, microstructure, mechanical properties, and performance of magnetron-sputtered carbon films with additions of silicon
Bauer, C. (author) / Leiste, H. (author) / Stuber, M. (author) / Ulrich, S. (author) / Holleck, H. (author)
MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK ; 34 ; 912-918
2003-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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