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Chemical mechanical planarization for microelectronics applications

Zantye, P. B. / Kumar, A. / Sikder, A. K.

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Chemical mechanical planarization for microelectronics applications

Zantye, P. B. / Kumar, A. / Sikder, A. K.

Chemical mechanical planarization for microelectronics applications

Zantye, P. B. / Kumar, A. / Sikder, A. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Chemical mechanical planarization for microelectronics applications

Contributors:

Zantye, P. B. (author) / Kumar, A. (author) / Sikder, A. K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING R REPORTS -LAUSANNE- ; 45 ; 89-220

Publication date:

2004-01-01

Size:

132 pages

ISSN:

0927-796X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 530

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