A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Self-Annealing Textures of Copper Damascene Interconnects
Self-Annealing Textures of Copper Damascene Interconnects
Self-Annealing Textures of Copper Damascene Interconnects
Lee, D. N. (author) / Lee, H. J. (author)
MATERIALS SCIENCE FORUM ; 467/470 ; 1333-1338
2004-01-01
6 pages
Article (Journal)
Unknown
DDC:
620.11
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