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A platform for research: civil engineering, architecture and urbanism
Effect of Line Geometries on Textures in Damascene Cu Lines
Effect of Line Geometries on Textures in Damascene Cu Lines
Effect of Line Geometries on Textures in Damascene Cu Lines
Paik, J.-M. (author) / Joo, Y.-C. (author) / Lee, D. N.
2002-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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