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    Effect of Sb+ implantation on copper silicides formation and morphology after annealing of Cu/Si structures

    New search for: Benkerri, M.
    New search for: Halimi, R.
    New search for: Bouabellou, A.
    New search for: Benouattas, N.

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    Effect of Sb+ implantation on copper silicides formation and morphology after annealing of Cu/Si structures

    New search for: Benkerri, M.
    New search for: Halimi, R.
    New search for: Bouabellou, A.
    New search for: Benouattas, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Sb+ implantation on copper silicides formation and morphology after annealing of Cu/Si structures

    New search for: Benkerri, M.
    New search for: Halimi, R.
    New search for: Bouabellou, A.
    New search for: Benouattas, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Effect of Sb+ implantation on copper silicides formation and morphology after annealing of Cu/Si structures

    Contributors:

    Benkerri, M. (author) / Halimi, R. (author) / Bouabellou, A. (author) / Benouattas, N. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 319-324

    Publication date:

    2004-01-01

    Size:

    6 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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