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Effect of Sb+ implantation on copper silicides formation and morphology after annealing of Cu/Si structures
Effect of Sb+ implantation on copper silicides formation and morphology after annealing of Cu/Si structures
Effect of Sb+ implantation on copper silicides formation and morphology after annealing of Cu/Si structures
Benkerri, M. (Autor:in) / Halimi, R. (Autor:in) / Bouabellou, A. (Autor:in) / Benouattas, N. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 319-324
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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