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    The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles

    New search for: Aboy, M.
    New search for: Pelaz, L.
    New search for: Marques, L. A.
    New search for: Lopez, P.
    New search for: Barbolla, J.
    New search for: Venezia, V. C.
    New search for: Duffy, R.
    New search for: Griffin, P. B.

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    The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles

    New search for: Aboy, M.
    New search for: Pelaz, L.
    New search for: Marques, L. A.
    New search for: Lopez, P.
    New search for: Barbolla, J.
    New search for: Venezia, V. C.
    New search for: Duffy, R.
    New search for: Griffin, P. B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles

    New search for: Aboy, M.
    New search for: Pelaz, L.
    New search for: Marques, L. A.
    New search for: Lopez, P.
    New search for: Barbolla, J.
    New search for: Venezia, V. C.
    New search for: Duffy, R.
    New search for: Griffin, P. B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles

    Contributors:

    Aboy, M. (author) / Pelaz, L. (author) / Marques, L. A. (author) / Lopez, P. (author) / Barbolla, J. (author) / Venezia, V. C. (author) / Duffy, R. (author) / Griffin, P. B. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 193-197

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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