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Characterization of silicon carbide thin films grown on Si and SiO2/Si substrates

Zanola, P. / Bontempi, E. / Ricciardi, C. / Barucca, G. / Depero, L. E.

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Characterization of silicon carbide thin films grown on Si and SiO2/Si substrates

Zanola, P. / Bontempi, E. / Ricciardi, C. / Barucca, G. / Depero, L. E.

Characterization of silicon carbide thin films grown on Si and SiO2/Si substrates

Zanola, P. / Bontempi, E. / Ricciardi, C. / Barucca, G. / Depero, L. E.

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Check availability in my library

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Document information

Title:

Characterization of silicon carbide thin films grown on Si and SiO2/Si substrates

Contributors:

Zanola, P. (author) / Bontempi, E. (author) / Ricciardi, C. (author) / Barucca, G. (author) / Depero, L. E. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 279-283

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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