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    Effect of germanium pre-amorphization on solid-phase epitaxial regrowth of antimony and arsenic ion-implanted silicon

    New search for: Ghanad Tavakoli, S.
    New search for: Baek, S.
    New search for: Hwang, H.

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    Effect of germanium pre-amorphization on solid-phase epitaxial regrowth of antimony and arsenic ion-implanted silicon

    New search for: Ghanad Tavakoli, S.
    New search for: Baek, S.
    New search for: Hwang, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of germanium pre-amorphization on solid-phase epitaxial regrowth of antimony and arsenic ion-implanted silicon

    New search for: Ghanad Tavakoli, S.
    New search for: Baek, S.
    New search for: Hwang, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Effect of germanium pre-amorphization on solid-phase epitaxial regrowth of antimony and arsenic ion-implanted silicon

    Contributors:

    Ghanad Tavakoli, S. (author) / Baek, S. (author) / Hwang, H. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 376-380

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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