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Precipitates in Antimony implanted Silicon

Kikuchi, Y. / Uesugi, F. / Kase, M. / Yoshida, M. / Watanabe, K. / Hashimoto, I.

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Precipitates in Antimony implanted Silicon

Kikuchi, Y. / Uesugi, F. / Kase, M. / Yoshida, M. / Watanabe, K. / Hashimoto, I.

Precipitates in Antimony implanted Silicon

Kikuchi, Y. / Uesugi, F. / Kase, M. / Yoshida, M. / Watanabe, K. / Hashimoto, I.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Precipitates in Antimony implanted Silicon

Contributors:

Kikuchi, Y. (author) / Uesugi, F. (author) / Kase, M. (author) / Yoshida, M. (author) / Watanabe, K. (author) / Hashimoto, I. (author)

Published in:

MATERIALS SCIENCE FORUM ; 1871-1874

Publication date:

1995-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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