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Stressed solid-phase epitaxial growth of ion-implanted amorphous silicon

Rudawski, N. G. / Jones, K. S. / Gwilliam, R.

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Stressed solid-phase epitaxial growth of ion-implanted amorphous silicon

Rudawski, N. G. / Jones, K. S. / Gwilliam, R.

Stressed solid-phase epitaxial growth of ion-implanted amorphous silicon

Rudawski, N. G. / Jones, K. S. / Gwilliam, R.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Stressed solid-phase epitaxial growth of ion-implanted amorphous silicon

Contributors:

Rudawski, N. G. (author) / Jones, K. S. (author) / Gwilliam, R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING R REPORTS -LAUSANNE- ; 61 ; 40-58

Publication date:

2008-01-01

Size:

19 pages

ISSN:

0927-796X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 530

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