AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application: Fid-Bau Portal

AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

Zhu, M. / Chen, P. / Fu, R. K. / Liu, W. / Lin, C. / Chu, P. K.

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AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

Zhu, M. / Chen, P. / Fu, R. K. / Liu, W. / Lin, C. / Chu, P. K.

AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

Zhu, M. / Chen, P. / Fu, R. K. / Liu, W. / Lin, C. / Chu, P. K.

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Check availability in my library

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Document information

Title:

AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

Contributors:

Zhu, M. (author) / Chen, P. (author) / Fu, R. K. (author) / Liu, W. (author) / Lin, C. (author) / Chu, P. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 239 ; 327-334

Publication date:

2005-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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