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Formation of array microstructures on silicon by multibeam interfered femtosecond laser pulses

Zhao, Q. Z. / Qiu, J. R. / Zhao, C. J. / Jiang, X. W. / Zhu, C. S.

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Formation of array microstructures on silicon by multibeam interfered femtosecond laser pulses

Zhao, Q. Z. / Qiu, J. R. / Zhao, C. J. / Jiang, X. W. / Zhu, C. S.

Formation of array microstructures on silicon by multibeam interfered femtosecond laser pulses

Zhao, Q. Z. / Qiu, J. R. / Zhao, C. J. / Jiang, X. W. / Zhu, C. S.

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Check availability in my library

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Document information

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Document information

Title:

Formation of array microstructures on silicon by multibeam interfered femtosecond laser pulses

Contributors:

Zhao, Q. Z. (author) / Qiu, J. R. (author) / Zhao, C. J. (author) / Jiang, X. W. (author) / Zhu, C. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 241 ; 416-419

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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