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Large-Area Three-Dimensional Structuring by Electrochemical Etching and Lithography
Large-Area Three-Dimensional Structuring by Electrochemical Etching and Lithography
Large-Area Three-Dimensional Structuring by Electrochemical Etching and Lithography
Matthias, S. (author) / Muller, F. (author) / Jamois, C. (author) / Wehrspohn, R. B. (author) / Gosele, U. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 16 ; 2166-2170
2004-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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