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    Temperature Facilitated ECR-Etching for Isotropic SiC Structuring

    New search for: Niebelschutz, F.
    New search for: Stauden, T.
    New search for: Tonisch, K.
    New search for: Pezoldt, J.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

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    Temperature Facilitated ECR-Etching for Isotropic SiC Structuring

    New search for: Niebelschutz, F.
    New search for: Stauden, T.
    New search for: Tonisch, K.
    New search for: Pezoldt, J.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Temperature Facilitated ECR-Etching for Isotropic SiC Structuring

    New search for: Niebelschutz, F.
    New search for: Stauden, T.
    New search for: Tonisch, K.
    New search for: Pezoldt, J.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Temperature Facilitated ECR-Etching for Isotropic SiC Structuring

    Contributors:

    Niebelschutz, F. (author) / Stauden, T. (author) / Tonisch, K. (author) / Pezoldt, J. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G. / Rupp, R. / Seyller, T.

    Published in:

    Silicon Carbide and Related Materials 2009 ; 849-852

    MATERIALS SCIENCE FORUM ; 645/648

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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