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    Ion Beam and Plasma-Induced Etching in Structuring Electronic Devices

    New search for: Fischer, K.
    New search for: Möhl, W.

    Abstract This paper describes principles and practical applications of ion beam and plasma-induced etching for microcircuit fabrication, particularly in relation to etching of cadmium-mercury-telluride.

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    Ion Beam and Plasma-Induced Etching in Structuring Electronic Devices

    New search for: Fischer, K.
    New search for: Möhl, W.

    Abstract This paper describes principles and practical applications of ion beam and plasma-induced etching for microcircuit fabrication, particularly in relation to etching of cadmium-mercury-telluride.

    Access

    Check access
    Check availability in my library
    Order at Subito €

    Ion Beam and Plasma-Induced Etching in Structuring Electronic Devices

    New search for: Fischer, K.
    New search for: Möhl, W.

    Abstract This paper describes principles and practical applications of ion beam and plasma-induced etching for microcircuit fabrication, particularly in relation to etching of cadmium-mercury-telluride.

    Access

    Check access
    Check availability in my library
    Order at Subito €

    Access

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    Title:

    Ion Beam and Plasma-Induced Etching in Structuring Electronic Devices

    Contributors:

    Fischer, K. (author) / Möhl, W. (author)

    Published in:

    Plasma-Surface Interactions and Processing of Materials ; 511-513

    NATO ASI Series ; 176

    Publication date:

    1990-01-01

    Size:

    3 pages

    ISBN:

    978-94-009-1946-4 , 978-94-010-7369-1

    ISSN:

    0168-132X

    DOI:

    https://doi.org/10.1007/978-94-009-1946-4_35

    Type of media:

    Article/Chapter (Book)

    Type of material:

    Electronic Resource

    Language:

    English

    Keywords:

    Detector Cell , Semiconductor Layer , Hole Cleaning , Integrate Circuit Board , Structure Electronic Device Chemistry , Industrial Chemistry/Chemical Engineering , Characterization and Evaluation of Materials , Nuclear Physics, Heavy Ions, Hadrons , Physical Chemistry

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