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    Electron irradiation effect on depth profiling of a SiO2/Si(100) surface by Auger electron spectroscopy

    New search for: Yakabe, T.
    New search for: Fujita, D.
    New search for: Yoshihara, K.

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    Electron irradiation effect on depth profiling of a SiO2/Si(100) surface by Auger electron spectroscopy

    New search for: Yakabe, T.
    New search for: Fujita, D.
    New search for: Yoshihara, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electron irradiation effect on depth profiling of a SiO2/Si(100) surface by Auger electron spectroscopy

    New search for: Yakabe, T.
    New search for: Fujita, D.
    New search for: Yoshihara, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Electron irradiation effect on depth profiling of a SiO2/Si(100) surface by Auger electron spectroscopy

    Contributors:

    Yakabe, T. (author) / Fujita, D. (author) / Yoshihara, K. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 241 ; 127-130

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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