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Auger electron depth profiling of the Cr/Al~2O~3 metallization system

Lu, H. / Cui, Y. D. / Qin, J. / Bao, C. L. / Shen, D. H.

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Auger electron depth profiling of the Cr/Al~2O~3 metallization system

Lu, H. / Cui, Y. D. / Qin, J. / Bao, C. L. / Shen, D. H.

Auger electron depth profiling of the Cr/Al~2O~3 metallization system

Lu, H. / Cui, Y. D. / Qin, J. / Bao, C. L. / Shen, D. H.

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Document information

Title:

Auger electron depth profiling of the Cr/Al~2O~3 metallization system

Contributors:

Lu, H. (author) / Cui, Y. D. (author) / Qin, J. (author) / Bao, C. L. (author) / Shen, D. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 103 ; 113-125

Publication date:

1996-01-01

Size:

13 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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