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Electron irradiation effect on depth profiling of a SiO2/Si(100) surface by Auger electron spectroscopy
Electron irradiation effect on depth profiling of a SiO2/Si(100) surface by Auger electron spectroscopy
Electron irradiation effect on depth profiling of a SiO2/Si(100) surface by Auger electron spectroscopy
Yakabe, T. (Autor:in) / Fujita, D. (Autor:in) / Yoshihara, K. (Autor:in)
APPLIED SURFACE SCIENCE ; 241 ; 127-130
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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