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Effect of Pt Interlayer on Thermal Stability of NiSi Films

He, Y. / Feng, J. Y. / Wu, Q. L.

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Effect of Pt Interlayer on Thermal Stability of NiSi Films

He, Y. / Feng, J. Y. / Wu, Q. L.

Effect of Pt Interlayer on Thermal Stability of NiSi Films

He, Y. / Feng, J. Y. / Wu, Q. L.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of Pt Interlayer on Thermal Stability of NiSi Films

Contributors:

He, Y. (author) / Feng, J. Y. (author) / Wu, Q. L. (author)

Published in:

MATERIALS SCIENCE FORUM ; 475/479 ; 3795-3798

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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