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Thermal stability and electrical characteristics of NiSi films with electroplated Ni(W) alloy

Xin, Y. / Hu, A. / Li, M. / Mao, D.

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Thermal stability and electrical characteristics of NiSi films with electroplated Ni(W) alloy

Xin, Y. / Hu, A. / Li, M. / Mao, D.

Thermal stability and electrical characteristics of NiSi films with electroplated Ni(W) alloy

Xin, Y. / Hu, A. / Li, M. / Mao, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thermal stability and electrical characteristics of NiSi films with electroplated Ni(W) alloy

Contributors:

Xin, Y. (author) / Hu, A. (author) / Li, M. (author) / Mao, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 9351-9354

Publication date:

2011-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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