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The Use of Trimethylaluminum for Producing Surface Layers by the PACVD Method

Sobiecki, J. R. / Sitek, R. / Wierzchon, T.

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The Use of Trimethylaluminum for Producing Surface Layers by the PACVD Method

Sobiecki, J. R. / Sitek, R. / Wierzchon, T.

The Use of Trimethylaluminum for Producing Surface Layers by the PACVD Method

Sobiecki, J. R. / Sitek, R. / Wierzchon, T.

Access

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

The Use of Trimethylaluminum for Producing Surface Layers by the PACVD Method

Contributors:

Sobiecki, J. R. (author) / Sitek, R. (author) / Wierzchon, T. (author)

Published in:

MATERIALS SCIENCE FORUM ; 475/479 ; 3887-3890

Publication date:

2005-01-01

Size:

4 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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