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Recent Developments in PACVD of Hard Material Layers
Recent Developments in PACVD of Hard Material Layers
Recent Developments in PACVD of Hard Material Layers
Symposium, Surface engineering: science and technology I ; 1999 ; San Diego; CA
1999-01-01
12 pages
Described as proceedings. Held during the 128th TMS annual meeting
Conference paper
English
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