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pMOSFETs with recessed and selectively regrown Si1-xGex source/drain junctions
pMOSFETs with recessed and selectively regrown Si1-xGex source/drain junctions
pMOSFETs with recessed and selectively regrown Si1-xGex source/drain junctions
Isheden, C. (author) / Hellstrom, P. E. (author) / von Haartman, M. (author) / Radamson, H. H. (author) / Ostling, M. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 8 ; 359-362
2005-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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