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    Characterization of electrically active dopant profiles with the spreading resistance probe

    New search for: Clarysse, T.
    New search for: Vanhaeren, D.
    New search for: Hoflijk, I.
    New search for: Vandervorst, W.

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    Characterization of electrically active dopant profiles with the spreading resistance probe

    New search for: Clarysse, T.
    New search for: Vanhaeren, D.
    New search for: Hoflijk, I.
    New search for: Vandervorst, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of electrically active dopant profiles with the spreading resistance probe

    New search for: Clarysse, T.
    New search for: Vanhaeren, D.
    New search for: Hoflijk, I.
    New search for: Vandervorst, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Characterization of electrically active dopant profiles with the spreading resistance probe

    Contributors:

    Clarysse, T. (author) / Vanhaeren, D. (author) / Hoflijk, I. (author) / Vandervorst, W. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING R REPORTS -LAUSANNE- ; 47 ; 123-206

    Publication date:

    2004-01-01

    Size:

    84 pages

    ISSN:

    0927-796X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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