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    Effects of crystalline regrowth on dopant profiles in preamorphized silicon

    New search for: Hopstaken, M. J. P.
    New search for: Tamminga, Y.
    New search for: Verheijen, M. A.
    New search for: Duffy, R.
    New search for: Venezia, V. C.
    New search for: Heringa, A.

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    Effects of crystalline regrowth on dopant profiles in preamorphized silicon

    New search for: Hopstaken, M. J. P.
    New search for: Tamminga, Y.
    New search for: Verheijen, M. A.
    New search for: Duffy, R.
    New search for: Venezia, V. C.
    New search for: Heringa, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of crystalline regrowth on dopant profiles in preamorphized silicon

    New search for: Hopstaken, M. J. P.
    New search for: Tamminga, Y.
    New search for: Verheijen, M. A.
    New search for: Duffy, R.
    New search for: Venezia, V. C.
    New search for: Heringa, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Effects of crystalline regrowth on dopant profiles in preamorphized silicon

    Contributors:

    Hopstaken, M. J. P. (author) / Tamminga, Y. (author) / Verheijen, M. A. (author) / Duffy, R. (author) / Venezia, V. C. (author) / Heringa, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 231/232 ; 688-692

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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