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Fabrication of Silicon Nitride Thick Coatings by Reactive RF Plasma Spraying

Yamada, M. / Inamoto, T. / Fukumoto, M. / Yasui, T.

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Fabrication of Silicon Nitride Thick Coatings by Reactive RF Plasma Spraying

Yamada, M. / Inamoto, T. / Fukumoto, M. / Yasui, T.

Fabrication of Silicon Nitride Thick Coatings by Reactive RF Plasma Spraying

Yamada, M. / Inamoto, T. / Fukumoto, M. / Yasui, T.

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Document information

Title:

Fabrication of Silicon Nitride Thick Coatings by Reactive RF Plasma Spraying

Contributors:

Yamada, M. (author) / Inamoto, T. (author) / Fukumoto, M. (author) / Yasui, T. (author)

Published in:

MATERIALS TRANSACTIONS ; 45 ; 3304-3308

Publication date:

2004-01-01

Size:

5 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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