TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition: Fid-Bau Portal

TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition

Mitchell, D. R. / Attard, D. J. / Finnie, K. S. / Triani, G. / Barbe, C. J. / Depagne, C. / Bartlett, J. R.

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TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition

Mitchell, D. R. / Attard, D. J. / Finnie, K. S. / Triani, G. / Barbe, C. J. / Depagne, C. / Bartlett, J. R.

TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition

Mitchell, D. R. / Attard, D. J. / Finnie, K. S. / Triani, G. / Barbe, C. J. / Depagne, C. / Bartlett, J. R.

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Document information

Title:

TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition

Contributors:

Mitchell, D. R. (author) / Attard, D. J. (author) / Finnie, K. S. (author) / Triani, G. (author) / Barbe, C. J. (author) / Depagne, C. (author) / Bartlett, J. R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 243 ; 267-279

Publication date:

2005-01-01

Size:

13 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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