Influence of the bilayer thickness on the optical properties of Al2O3-Y2O3 dielectric nanolaminate films grown by thermal atomic layer deposition: Fid-Bau Portal

Influence of the bilayer thickness on the optical properties of Al2O3-Y2O3 dielectric nanolaminate films grown by thermal atomic layer deposition

López, J. / Sotelo, A. / Castillón, F.F. / Machorro, R. / Nedev, N. / Farías, M.H. / Tiznado, H.

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Influence of the bilayer thickness on the optical properties of Al2O3-Y2O3 dielectric nanolaminate films grown by thermal atomic layer deposition

López, J. / Sotelo, A. / Castillón, F.F. / Machorro, R. / Nedev, N. / Farías, M.H. / Tiznado, H.

Influence of the bilayer thickness on the optical properties of Al2O3-Y2O3 dielectric nanolaminate films grown by thermal atomic layer deposition

López, J. / Sotelo, A. / Castillón, F.F. / Machorro, R. / Nedev, N. / Farías, M.H. / Tiznado, H.

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Title:

Influence of the bilayer thickness on the optical properties of Al2O3-Y2O3 dielectric nanolaminate films grown by thermal atomic layer deposition

Contributors:

López, J. (author) / Sotelo, A. (author) / Castillón, F.F. (author) / Machorro, R. (author) / Nedev, N. (author) / Farías, M.H. (author) / Tiznado, H. (author)

Published in:

Materials research bulletin ; 87 ; 14-19

Publication date:

2017-01-01

Size:

6 pages

ISSN:

0025-5408

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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