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    Fabrication of Compact Ion Implanter for Silicon Carbide Devices

    New search for: Mitani, S.
    New search for: Yamaguchi, S.
    New search for: Furukawa, S.
    New search for: Nakata, T.
    New search for: Horino, Y.
    New search for: Ono, R.
    New search for: Hosokawa, Y.
    New search for: Miyamoto, M.
    New search for: Nishino, S.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

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    Fabrication of Compact Ion Implanter for Silicon Carbide Devices

    New search for: Mitani, S.
    New search for: Yamaguchi, S.
    New search for: Furukawa, S.
    New search for: Nakata, T.
    New search for: Horino, Y.
    New search for: Ono, R.
    New search for: Hosokawa, Y.
    New search for: Miyamoto, M.
    New search for: Nishino, S.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication of Compact Ion Implanter for Silicon Carbide Devices

    New search for: Mitani, S.
    New search for: Yamaguchi, S.
    New search for: Furukawa, S.
    New search for: Nakata, T.
    New search for: Horino, Y.
    New search for: Ono, R.
    New search for: Hosokawa, Y.
    New search for: Miyamoto, M.
    New search for: Nishino, S.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Fabrication of Compact Ion Implanter for Silicon Carbide Devices

    Contributors:

    Mitani, S. (author) / Yamaguchi, S. (author) / Furukawa, S. (author) / Nakata, T. (author) / Horino, Y. (author) / Ono, R. (author) / Hosokawa, Y. (author) / Miyamoto, M. (author) / Nishino, S. (author) / Nipoti, R.

    Published in:

    Silicon Carbide and Related Materials 2004 ; 605-608

    MATERIALS SCIENCE FORUM ; 483/485

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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