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POLYCRYSTALLINE SILICON CARBIDE SINTERED COMPACT
PROBLEM TO BE SOLVED: To provide a polycrystalline silicon carbide sintered compact having a high heat conductivity and high electric resistivity.SOLUTION: The present invention provides a polycrystalline silicon carbide sintered compact that is reduced in nitrogen concentration and boron concentration, specifically, a polycrystalline silicon carbide sintered compact having a nitrogen concentration of 85 ppm or less and a boron concentration of 200 ppm or less.
【課題】高い熱伝導を有し、かつ、高い電気抵抗率を有する多結晶炭化ケイ素焼結体を提供する。【解決手段】窒素濃度、ホウ素濃度が低減された多結晶炭化ケイ素焼結体、より具体的には、窒素濃度が85ppm以下であり、ホウ素濃度が200ppm以下である多結晶炭化ケイ素焼結体により、課題を解決する。【選択図】なし
POLYCRYSTALLINE SILICON CARBIDE SINTERED COMPACT
PROBLEM TO BE SOLVED: To provide a polycrystalline silicon carbide sintered compact having a high heat conductivity and high electric resistivity.SOLUTION: The present invention provides a polycrystalline silicon carbide sintered compact that is reduced in nitrogen concentration and boron concentration, specifically, a polycrystalline silicon carbide sintered compact having a nitrogen concentration of 85 ppm or less and a boron concentration of 200 ppm or less.
【課題】高い熱伝導を有し、かつ、高い電気抵抗率を有する多結晶炭化ケイ素焼結体を提供する。【解決手段】窒素濃度、ホウ素濃度が低減された多結晶炭化ケイ素焼結体、より具体的には、窒素濃度が85ppm以下であり、ホウ素濃度が200ppm以下である多結晶炭化ケイ素焼結体により、課題を解決する。【選択図】なし
POLYCRYSTALLINE SILICON CARBIDE SINTERED COMPACT
多結晶炭化ケイ素焼結体
HAMAME KOJI (author) / YAMAHARA KEIJI (author) / KATAYAMA TOSHIAKI (author) / MIYAMOTO YUKIHIRO (author)
2016-01-21
Patent
Electronic Resource
Japanese
European Patent Office | 2024
|European Patent Office | 2015
|European Patent Office | 2016
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