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Preparation of highly oriented aluminum nitride thin films on molybdenum bottom electrodes using metal interlayers
Preparation of highly oriented aluminum nitride thin films on molybdenum bottom electrodes using metal interlayers
Preparation of highly oriented aluminum nitride thin films on molybdenum bottom electrodes using metal interlayers
Akiyama, M. (author) / Ueno, N. (author) / Tateyama, H. (author) / Nagao, K. (author) / Yamada, T. (author)
JOURNAL OF MATERIALS SCIENCE ; 40 ; 1159-1162
2005-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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