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    Growth of highly c-axis oriented aluminum nitride thin films on β-tantalum bottom electrodes

    New search for: Akiyama, M.
    New search for: Ueno, N.
    New search for: Nagao, K.
    New search for: Yamada, T.

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    Growth of highly c-axis oriented aluminum nitride thin films on β-tantalum bottom electrodes

    New search for: Akiyama, M.
    New search for: Ueno, N.
    New search for: Nagao, K.
    New search for: Yamada, T.

    Access

    Check availability in my library
    Order at Subito €
    Access via TIB

    Growth of highly c-axis oriented aluminum nitride thin films on β-tantalum bottom electrodes

    New search for: Akiyama, M.
    New search for: Ueno, N.
    New search for: Nagao, K.
    New search for: Yamada, T.

    Access

    Check availability in my library
    Order at Subito €
    Access via TIB

    Access

    Check availability in my library
    Order at Subito €
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    Document information
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    Document information
    Title:

    Growth of highly c-axis oriented aluminum nitride thin films on β-tantalum bottom electrodes

    Contributors:

    Akiyama, M. ( author ) / Ueno, N. ( author ) / Nagao, K. ( author ) / Yamada, T. ( author )

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 41 ; 4691-4694

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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