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Analysis of interface layers by spectroscopic ellipsometry

Kim, T. J. / Yoon, J. J. / Kim, Y. D. / Aspnes, D. E. / Klein, M. V. / Ko, D. S. / Kim, Y. W. / Elarde, V. C. / Coleman, J. J.

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Analysis of interface layers by spectroscopic ellipsometry

Kim, T. J. / Yoon, J. J. / Kim, Y. D. / Aspnes, D. E. / Klein, M. V. / Ko, D. S. / Kim, Y. W. / Elarde, V. C. / Coleman, J. J.

Analysis of interface layers by spectroscopic ellipsometry

Kim, T. J. / Yoon, J. J. / Kim, Y. D. / Aspnes, D. E. / Klein, M. V. / Ko, D. S. / Kim, Y. W. / Elarde, V. C. / Coleman, J. J.

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Document information

Title:

Analysis of interface layers by spectroscopic ellipsometry

Contributors:

Kim, T. J. (author) / Yoon, J. J. (author) / Kim, Y. D. (author) / Aspnes, D. E. (author) / Klein, M. V. (author) / Ko, D. S. (author) / Kim, Y. W. (author) / Elarde, V. C. (author) / Coleman, J. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 640-642

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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