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    Infrared spectroscopic ellipsometry of micrometer-sized SiO2 line gratings

    New search for: Walder, Cordula
    New search for: Zellmeier, Matthias
    New search for: Rappich, Jörg
    New search for: Ketelsen, Helge
    New search for: Hinrichs, Karsten

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    Infrared spectroscopic ellipsometry of micrometer-sized SiO2 line gratings

    New search for: Walder, Cordula
    New search for: Zellmeier, Matthias
    New search for: Rappich, Jörg
    New search for: Ketelsen, Helge
    New search for: Hinrichs, Karsten

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Infrared spectroscopic ellipsometry of micrometer-sized SiO2 line gratings

    New search for: Walder, Cordula
    New search for: Zellmeier, Matthias
    New search for: Rappich, Jörg
    New search for: Ketelsen, Helge
    New search for: Hinrichs, Karsten

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Infrared spectroscopic ellipsometry of micrometer-sized SiO2 line gratings

    Contributors:

    Walder, Cordula (author) / Zellmeier, Matthias (author) / Rappich, Jörg (author) / Ketelsen, Helge (author) / Hinrichs, Karsten (author)

    Published in:

    Applied surface science ; 416 ; 397-401

    Publication date:

    2017-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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