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Thickness dependence of properties of ZnO:Ga films deposited by rf magnetron sputtering
Thickness dependence of properties of ZnO:Ga films deposited by rf magnetron sputtering
Thickness dependence of properties of ZnO:Ga films deposited by rf magnetron sputtering
APPLIED SURFACE SCIENCE ; 245 ; 310-315
2005-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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