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Surface reaction kinetics of metal b-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
Surface reaction kinetics of metal b-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
Surface reaction kinetics of metal b-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
Van, T. T. (author) / Chang, J. P. (author)
APPLIED SURFACE SCIENCE ; 246 ; 250-261
2005-01-01
12 pages
Article (Journal)
English
DDC:
621.35
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