Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Surface reaction kinetics of metal b-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
Surface reaction kinetics of metal b-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
Surface reaction kinetics of metal b-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
Van, T. T. (Autor:in) / Chang, J. P. (Autor:in)
APPLIED SURFACE SCIENCE ; 246 ; 250-261
01.01.2005
12 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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