Atomic layer deposition of ytterbium oxide using b-diketonate and ozone precursors: Fid-Bau Portal

Atomic layer deposition of ytterbium oxide using b-diketonate and ozone precursors

Bosund, M. / Mizohata, K. / Hakkarainen, T. / Putkonen, M. / Soderlund, M. / Honkanen, S. / Lipsanen, H.

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Atomic layer deposition of ytterbium oxide using b-diketonate and ozone precursors

Bosund, M. / Mizohata, K. / Hakkarainen, T. / Putkonen, M. / Soderlund, M. / Honkanen, S. / Lipsanen, H.

Atomic layer deposition of ytterbium oxide using b-diketonate and ozone precursors

Bosund, M. / Mizohata, K. / Hakkarainen, T. / Putkonen, M. / Soderlund, M. / Honkanen, S. / Lipsanen, H.

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Title:

Atomic layer deposition of ytterbium oxide using b-diketonate and ozone precursors

Contributors:

Bosund, M. (author) / Mizohata, K. (author) / Hakkarainen, T. (author) / Putkonen, M. (author) / Soderlund, M. (author) / Honkanen, S. (author) / Lipsanen, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 847-851

Publication date:

2009-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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