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    Origin and FEM-assisted evaluation of residual stress in thermally oxidized porous silicon

    New search for: Tóth, G. z.
    New search for: Kordás, K. n.
    New search for: Edit Pap, A.
    New search for: Vähäkangas, J.
    New search for: Uusimäki, A.
    New search for: Leppävuori, S.

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    Origin and FEM-assisted evaluation of residual stress in thermally oxidized porous silicon

    New search for: Tóth, G. z.
    New search for: Kordás, K. n.
    New search for: Edit Pap, A.
    New search for: Vähäkangas, J.
    New search for: Uusimäki, A.
    New search for: Leppävuori, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Origin and FEM-assisted evaluation of residual stress in thermally oxidized porous silicon

    New search for: Tóth, G. z.
    New search for: Kordás, K. n.
    New search for: Edit Pap, A.
    New search for: Vähäkangas, J.
    New search for: Uusimäki, A.
    New search for: Leppävuori, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Origin and FEM-assisted evaluation of residual stress in thermally oxidized porous silicon

    Contributors:

    Tóth, G. z. (author) / Kordás, K. n. (author) / Edit Pap, A. (author) / Vähäkangas, J. (author) / Uusimäki, A. (author) / Leppävuori, S. (author)

    Published in:

    COMPUTATIONAL MATERIALS SCIENCE ; 34 ; 123-128

    Publication date:

    2005-01-01

    Size:

    6 pages

    ISSN:

    0927-0256

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 510

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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