Characterisation of TiN and TiAlN thin films deposited on ground surfaces using focused ion beam milling: Fid-Bau Portal

Characterisation of TiN and TiAlN thin films deposited on ground surfaces using focused ion beam milling

Cairney, J. M. / Harris, S. G. / Ma, L. W. / Munroe, P. R. / Doyle, E. D.

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Characterisation of TiN and TiAlN thin films deposited on ground surfaces using focused ion beam milling

Cairney, J. M. / Harris, S. G. / Ma, L. W. / Munroe, P. R. / Doyle, E. D.

Characterisation of TiN and TiAlN thin films deposited on ground surfaces using focused ion beam milling

Cairney, J. M. / Harris, S. G. / Ma, L. W. / Munroe, P. R. / Doyle, E. D.

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Document information

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Document information

Title:

Characterisation of TiN and TiAlN thin films deposited on ground surfaces using focused ion beam milling

Contributors:

Cairney, J. M. (author) / Harris, S. G. (author) / Ma, L. W. (author) / Munroe, P. R. (author) / Doyle, E. D. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 39 ; 3569-3575

Publication date:

2004-01-01

Size:

7 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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