Platinum thin films deposited on silicon oxide by focused ion beam: characterization and application: Fid-Bau Portal

Platinum thin films deposited on silicon oxide by focused ion beam: characterization and application

Vaz, A. R. / Silva, M. M. / Leon, J. / Moshkalev, S. A. / Swart, J. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Platinum thin films deposited on silicon oxide by focused ion beam: characterization and application

Vaz, A. R. / Silva, M. M. / Leon, J. / Moshkalev, S. A. / Swart, J. W.

Platinum thin films deposited on silicon oxide by focused ion beam: characterization and application

Vaz, A. R. / Silva, M. M. / Leon, J. / Moshkalev, S. A. / Swart, J. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Platinum thin films deposited on silicon oxide by focused ion beam: characterization and application

Contributors:

Vaz, A. R. (author) / Silva, M. M. (author) / Leon, J. (author) / Moshkalev, S. A. (author) / Swart, J. W. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 43 ; 3429-3434

Publication date:

2008-01-01

Size:

6 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Mohite, K. C. / Khollam, Y. B. / Mandale, A. B. et al. | British Library Online Contents | 2003

Characterization of yttria-stabilized zirconia thin films deposited by electron beam evaporation on silicon substrates

Hartmanova, M. / Thurzo, I. / Jergel, M. et al. | British Library Online Contents | 1998

Electrical resistivity of vacuum-arc-deposited platinum thin films

Avrekh, M. / Monteiro, O. R. / Brown, I. G. | British Library Online Contents | 2000

Characterisation of TiN and TiAlN thin films deposited on ground surfaces using focused ion beam milling

Cairney, J. M. / Harris, S. G. / Ma, L. W. et al. | British Library Online Contents | 2004

Preparation, characterization and application of RF sputter deposited boron doped silicon dioxide thin films

Tiwari, R. / Chandra, S. / Chakraborty, B. R. | British Library Online Contents | 2013