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Characterization of TiN thin films subjected to nanoindentation using focused ion beam milling

Ma, L. W. / Cairney, J. M. / Hoffman, M. J. / Munroe, P. R.

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Characterization of TiN thin films subjected to nanoindentation using focused ion beam milling

Ma, L. W. / Cairney, J. M. / Hoffman, M. J. / Munroe, P. R.

Characterization of TiN thin films subjected to nanoindentation using focused ion beam milling

Ma, L. W. / Cairney, J. M. / Hoffman, M. J. / Munroe, P. R.

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Check availability in my library

Order at Subito €

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Document information

Title:

Characterization of TiN thin films subjected to nanoindentation using focused ion beam milling

Contributors:

Ma, L. W. (author) / Cairney, J. M. (author) / Hoffman, M. J. (author) / Munroe, P. R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 237 ; 627-631

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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