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Fracture toughness measurement of thin-film silicon

ANDO, T. / LI, X. / NAKAO, S. / KASAI, T. / TANAKA, H. / SHIKIDA, M. / SATO, K.

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Fracture toughness measurement of thin-film silicon

ANDO, T. / LI, X. / NAKAO, S. / KASAI, T. / TANAKA, H. / SHIKIDA, M. / SATO, K.

Fracture toughness measurement of thin-film silicon

ANDO, T. / LI, X. / NAKAO, S. / KASAI, T. / TANAKA, H. / SHIKIDA, M. / SATO, K.

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Check availability in my library

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Document information

Title:

Fracture toughness measurement of thin-film silicon

Contributors:

ANDO, T. (author) / LI, X. (author) / NAKAO, S. (author) / KASAI, T. (author) / TANAKA, H. (author) / SHIKIDA, M. (author) / SATO, K. (author)

Published in:

FATIGUE AND FRACTURE OF ENGINEERING MATERIALS AND STRUCTURES ; 28 ; 687-694

Publication date:

2005-01-01

Size:

8 pages

ISSN:

8756-758X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1123

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