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Strength Analysis of MEMS Micromirror Devices - Effects of Loading Mode and Etching Damage

Izumi, S. / Ping, C. W. / Yamaguchi, M. / Sakai, S. / Suzuki, A. / Ueda, Y.

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Strength Analysis of MEMS Micromirror Devices - Effects of Loading Mode and Etching Damage

Izumi, S. / Ping, C. W. / Yamaguchi, M. / Sakai, S. / Suzuki, A. / Ueda, Y.

Strength Analysis of MEMS Micromirror Devices - Effects of Loading Mode and Etching Damage

Izumi, S. / Ping, C. W. / Yamaguchi, M. / Sakai, S. / Suzuki, A. / Ueda, Y.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Strength Analysis of MEMS Micromirror Devices - Effects of Loading Mode and Etching Damage

Contributors:

Izumi, S. (author) / Ping, C. W. (author) / Yamaguchi, M. (author) / Sakai, S. (author) / Suzuki, A. (author) / Ueda, Y. (author) / Kim, Y.-J. / Bae, D.-H.

Published in:

Advances in Fracture and Strength ; 527-532

KEY ENGINEERING MATERIALS ; 297/300

Publication date:

2005-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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