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Fracture Behavior of Single- and Polycrystalline Silicon Films for MEMS Applications

Son, D. I. / Kim, J. J. / Kwon, D. G.

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Fracture Behavior of Single- and Polycrystalline Silicon Films for MEMS Applications

Son, D. I. / Kim, J. J. / Kwon, D. G.

Fracture Behavior of Single- and Polycrystalline Silicon Films for MEMS Applications

Son, D. I. / Kim, J. J. / Kwon, D. G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fracture Behavior of Single- and Polycrystalline Silicon Films for MEMS Applications

Contributors:

Son, D. I. (author) / Kim, J. J. (author) / Kwon, D. G. (author) / Kim, Y.-J. / Bae, D.-H.

Published in:

Advances in Fracture and Strength ; 551-556

KEY ENGINEERING MATERIALS ; 297/300

Publication date:

2005-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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