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Characterization of strength properties of thin polycrystalline silicon films for MEMS applications:

Boroch, R. / Wiaranowski, J. / Mueller-Fiedler, R. / Ebert, M. / Bagdahn, J.

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Characterization of strength properties of thin polycrystalline silicon films for MEMS applications:

Boroch, R. / Wiaranowski, J. / Mueller-Fiedler, R. / Ebert, M. / Bagdahn, J.

Characterization of strength properties of thin polycrystalline silicon films for MEMS applications:

Boroch, R. / Wiaranowski, J. / Mueller-Fiedler, R. / Ebert, M. / Bagdahn, J.

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Check availability in my library

Order at Subito €

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Document information

Title:

Characterization of strength properties of thin polycrystalline silicon films for MEMS applications:

Contributors:

Boroch, R. (author) / Wiaranowski, J. (author) / Mueller-Fiedler, R. (author) / Ebert, M. (author) / Bagdahn, J. (author)

Published in:

FATIGUE AND FRACTURE OF ENGINEERING MATERIALS AND STRUCTURES ; 30 ; 2-12

Publication date:

2007-01-01

Size:

11 pages

ISSN:

8756-758X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1123

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