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The Improvement of Wet Anisotropic Etching with Megasonic Wave

Che, W. S. / Suk, C. G. / Park, T. G. / Kim, J. T. / Park, J. H.

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The Improvement of Wet Anisotropic Etching with Megasonic Wave

Che, W. S. / Suk, C. G. / Park, T. G. / Kim, J. T. / Park, J. H.

The Improvement of Wet Anisotropic Etching with Megasonic Wave

Che, W. S. / Suk, C. G. / Park, T. G. / Kim, J. T. / Park, J. H.

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Document information

Title:

The Improvement of Wet Anisotropic Etching with Megasonic Wave

Contributors:

Che, W. S. (author) / Suk, C. G. (author) / Park, T. G. (author) / Kim, J. T. (author) / Park, J. H. (author) / Kim, Y.-J. / Bae, D.-H.

Published in:

Advances in Fracture and Strength ; 557-561

KEY ENGINEERING MATERIALS ; 297/300

Publication date:

2005-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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