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Formation of niobium oxynitrides by rapid thermal processing (RTP)
Formation of niobium oxynitrides by rapid thermal processing (RTP)
Formation of niobium oxynitrides by rapid thermal processing (RTP)
Matylitskaya, V. A. (author) / Bock, W. (author) / Thoma, K. (author) / Kolbesen, B. O. (author)
APPLIED SURFACE SCIENCE ; 252 ; 205-210
2005-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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